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Light source×ケイエルブイ - List of Manufacturers, Suppliers, Companies and Products

Light source Product List

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Multispectral LED light source device ALE/1

High-output, high-stability LED light source device. High-power UV output up to 30W, mercury-free, with selectable built-in LEDs.

This is a high-output, high-stability LED light source device that replaces conventional discharge lamps. It can accommodate up to five types of LEDs, allowing for output at multiple wavelengths. Additionally, the LED modules can be easily replaced, providing flexibility for changes in applications.

  • Stepper
  • Other semiconductor manufacturing equipment

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Multispectral LED light source device ALE/2

A high-output, high-stability LED light source device capable of mounting multiple modules of the same wavelength. Maximum high-power UV output of 80W, mercury-free.

ALE/2 is an LED ultraviolet irradiation device that achieves high output and high stability, surpassing conventional discharge lamps. It is equipped with up to four built-in LED wavelengths, allowing for multiple wavelength outputs. A significant difference from the ALE/1 in the ALE series is the ability to mount multiple modules of the same wavelength. Therefore, it is possible to output only the i-line or g-line at high intensity, making it suitable for semiconductor applications. The LED modules can be easily replaced, allowing for flexible adaptation to changes in applications.

  • Stepper
  • Other semiconductor manufacturing equipment

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Multispectral LED light source device ALE/3

High-output, high-stability LED light source device. High-power UV output up to 15W, mercury-free, with selectable built-in LEDs.

This is a high-output, high-stability LED light source device that replaces conventional discharge lamps. It can accommodate up to five types of LEDs, allowing for output at multiple wavelengths. Additionally, the LED modules can be easily replaced, providing flexibility for changes in applications.

  • Stepper
  • Other semiconductor manufacturing equipment

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